Thin wafer insert

Details Thin wafer insert Thin wafer insert

2007-05-22

2007-05-22

Mohandesi, Jila M. (Department: 3728)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C206S454000, C206S832000, C211S041180

Reexamination Certificate

active

10478587

ABSTRACT:
A plastic insert (20) is configured to provide support of thin wafers (49) in wafer carriers (45) configured to provide peripheral wafer support. The invention includes the insert, the insert in combination with a wafer carrier, and the, methods of supporting the thin wafers as provided by the insert and the wafer carrier. The insert (20), in preferred embodiments, utilize tabs (80, 82) that fit into the side wall recesses (53) and have an interference fit in said recesses to secure the insert in place.

REFERENCES:
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patent: 5346518 (1994-09-01), Baseman et al.
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patent: 5890598 (1999-04-01), Hayashida et al.
patent: 6099302 (2000-08-01), Hong et al.
patent: 6287112 (2001-09-01), Van Voorst Vader et al.

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