Thin hafnium oxide film and method for depositing same

Stock material or miscellaneous articles – All metal or with adjacent metals – Composite; i.e. – plural – adjacent – spatially distinct metal...

Reexamination Certificate

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C428S218000, C428S428000, C428S432000, C428S457000, C428S469000, C428S426000, C204S192100, C204S192110, C204S192120, C204S192130, C204S192140, C204S192150, C204S192160, C204S192170, C204S192180, C204S192200, C204S192210, C204S192220, C204S192230, C204S192240, C204S192250, C106S286100, C438S003000, C438S253000, C359S359000, C252S062590

Reexamination Certificate

active

07037595

ABSTRACT:
A thin layer of hafnium oxide or stacking of thin layers comprising hafnium oxide layers for producing surface treatments of optical components, or optical components, in which at least one layer of hafnium oxide is in amorphous form and has a density less than 8 gm/cm3. The layer is formed by depositing on a substrate without energy input to the substrate.

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