Thin film transistor substrate and fabricating method thereof

Details Thin film transistor substrate and fabricating method thereof Thin film transistor substrate and fabricating method thereof

2008-03-11

2008-03-11

Schillinger, Laura M. (Department: 2813)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C438S149000, C438S106000, C349S141000

Reexamination Certificate

active

11003386

ABSTRACT:
A thin film transistor substrate and a fabricating method thereof that are capable of improving an aperture ratio. A gate electrode on that substrate has an inclined head and a concave neck.

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