Thin film transistor having copper alloy wire and method of...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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C438S688000, C438S927000, C438S149000

Reexamination Certificate

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07052993

ABSTRACT:
A thin film transistor and a method of manufacturing the same includes forming a copper alloy line on substrate, an oxidation film formed on the upper surface of the copper alloy line. The copper alloy line includes a concentration y of magnesium, and the copper alloy line has a thickness t. the concentration y of magnesium in copper alloy line is related to the thickness is as follows:y≤94t.

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patent: 6249055 (2001-06-01), Dubin
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