Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Gettering of semiconductor substrate
Reexamination Certificate
2004-12-06
2009-02-24
Smith, Matthew (Department: 2823)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Gettering of semiconductor substrate
C438S151000, C438S473000, C438S476000, C257SE21317
Reexamination Certificate
active
07494851
ABSTRACT:
A thin film transistor array substrate and a method for manufacturing the same is disclosed, in which it is possible to prevent mobile ions contained in a substrate from penetrating into a semiconductor layer by the gettering effect or neutralization in case soda lime glass is used for the substrate. The method includes forming a buffer layer on a substrate; doping impurity ions in the buffer layer; and forming a pixel electrode and a thin film transistor including a semiconductor layer on the buffer layer.
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Nam Seung Hee
Oh Jae Young
LG Display Co. Ltd.
Maldonado Julio J.
McKenna Long & Aldridge LLP
Smith Matthew
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