Thin film transistor array panel and method of manufacturing...

Details Thin film transistor array panel and method of manufacturing... Thin film transistor array panel and method of manufacturing...

2006-01-20

2010-11-16

Ha, Nathan W (Department: 2814)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

C257SE33053

Reexamination Certificate

active

07833813

ABSTRACT:
The present invention provides a method of manufacturing a TFT array panel in a cost-effective manner. The method includes: forming thin film transistors each having a gate electrode, a source electrode, and a drain electrode; forming an insulating layer on the thin film transistors; forming a first conductive layer electrically connected to the drain electrodes on the insulating layer; forming a second conductive layer on the first conductive layer; forming a photoresist layer including first portions and second portions thinner than the first portions; selectively etching the second conductive layer with a first etchant by using the photoresist layer as an etch blocker; and selectively etching the first conductive layer with a second etchant by using the photoresist layer and the second conductive layer as etch blockers.

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