Thin film transistor array panel and manufacture thereof

Details Thin film transistor array panel and manufacture thereof Thin film transistor array panel and manufacture thereof

2011-07-12

2011-07-12

Richards, N Drew (Department: 2895)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C438S149000, C438S151000, C438S158000, C438S166000, C257S040000, C257S053000, C257S059000, C257S067000, C257S079000, C257SE21414

Reexamination Certificate

active

07977144

ABSTRACT:
A method for a thin film transistor array panel includes forming a gate line and a pixel electrode on a substrate, forming a gate insulating layer covering the gate line, forming a data line including a source electrode and a drain electrode on the gate insulating layer, forming an interlayer insulating layer covering the data line and the drain electrode on the gate insulating layer, forming a first opening in the interlayer insulating layer, forming an organic semiconductor in the first opening, forming a passivation layer on the organic semiconductor and the interlayer insulating layer, and forming a second opening in the interlayer insulating layer to expose the pixel electrode.

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