Thin-film transistor and method of manufacture thereof

Details Thin-film transistor and method of manufacture thereof Thin-film transistor and method of manufacture thereof

2006-05-30

2006-05-30

Chaudhan, Chandra (Department: 2891)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C438S657000, C257S066000, C257S755000

Reexamination Certificate

active

07052944

ABSTRACT:
A thin-film transistor is provided which prevents the degradation of transistor characteristics due to ion channeling. A thin-film transistor (10) includes thin crystalline silicon (2) including source and drain regions (2a) and a channel region (2b), which are formed on a substrate (1); a gate insulator (3) formed on the crystalline silicon (2); and a gate electrode (4) formed on the gate insulator (3). The gate electrode (4) includes an amorphous layer (5) and a crystalline layer (6).

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