Thin film transistor and method of fabricating the same

Details Thin film transistor and method of fabricating the same Thin film transistor and method of fabricating the same

1998-07-13

2000-10-17

Nelms, David

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

438153, H01L 2100

Patent

active

061330744

ABSTRACT:
A thin film transistor (TFT) which may be used as a pixel drive element in an active matrix LCD display includes a pair of side wall spacers adjacent to the opposing side walls of its gate electrode. The side wall spacers provide the gate electrode with a substantially rectangular cross section, such that the gate electrode has a substantially constant thermal conductivity over its area. The TFT has a uniform device characteristic.

REFERENCES:
patent: 4654121 (1987-03-01), Miller et al.
patent: 5543635 (1996-08-01), Nguyen
patent: 5656824 (1997-08-01), Den Boer et al.
patent: 5728604 (1998-03-01), Rha et al.

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