Thin film transistor and fabricating method thereof

Details Thin film transistor and fabricating method thereof Thin film transistor and fabricating method thereof

2006-06-20

2006-06-20

Prenty, Mark V. (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S655000

Reexamination Certificate

active

07064386

ABSTRACT:
Thin film transistors and methods of fabricating thin film transistors having low OFF state leakage current. The OFF state leakage current reduction is achieved by using doping implantation energies such that the average penetration depth of the doping impurity into the semiconductor, the projected range Rp, is located below the surface of the semiconductor layer, and such that the concentration of impurities remaining at the surface of the semiconductor layer is relatively small.

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