Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
Reexamination Certificate
2007-10-09
2007-10-09
Pert, Evan (Department: 2826)
Semiconductor device manufacturing: process
Making passive device
Stacked capacitor
C438S591000, C438S778000, C257S532000, C257SE29343
Reexamination Certificate
active
11046876
ABSTRACT:
A thin film structure and a capacitor using the film structure and methods for forming the same. The thin film structure may include a first film formed on a substrate using a first reactant and an oxidant for oxidizing the first reactant. A second film may be formed on the first film to suppress crystallization of the first film. A capacitor may include a dielectric layer, which may further include the first thin film and the second thin film.
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Choi Dae-Sik
Choi Han-Mei
Kim Sung-Tae
Kim Young-Sun
Lee Seung-Hwan
Harness & Dickey & Pierce P.L.C.
Pert Evan
Samsung Electronics Co,. Ltd.
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