Thin film semiconductor device, production process and...

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Non-single crystal – or recrystallized – material with...

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

Reexamination Certificate

active

06872977

ABSTRACT:
A thin film semiconductor device has a semiconductor thin film with a film thickness of 200 nm or less. The semiconductor thin film is formed over a dielectric substrate with a warping point of 600° C. or lower. The semiconductor thin film has a region in which a first semiconductor thin film region with the defect density of 1×1017cm−3or less and a second semiconductor thin film region with the defect density of 1×1017cm−3or more are disposed alternately in the form of stripes. The width of the first semiconductor thin film region is larger than the width of the semiconductor thin film region. The grain boundaries, grain size and orientation of crystals over the dielectric substrate are controlled, so that a high quality thin film semiconductor device is obtained.

REFERENCES:
patent: 5753544 (1998-05-01), Cho et al.
patent: 6087679 (2000-07-01), Yamazaki et al.
patent: 6144041 (2000-11-01), Yamazaki et al.
patent: 6337232 (2002-01-01), Kusumoto et al.
patent: 6358766 (2002-03-01), Kasahara
patent: 6756614 (2004-06-01), Hatano et al.
patent: 20010015441 (2001-08-01), Kawasaki et al.
patent: 2000058845 (2000-02-01), None
patent: 2000-68520 (2000-03-01), None
patent: WO 9745827 (1997-12-01), None

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Thin film semiconductor device, production process and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thin film semiconductor device, production process and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin film semiconductor device, production process and... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3416668

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.