Thin film semiconductor device, polycrystalline...

Details Thin film semiconductor device, polycrystalline... Thin film semiconductor device, polycrystalline...

2006-10-03

2006-10-03

Nguyen, Tuan H. (Department: 2813)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C438S487000, C438S795000

Reexamination Certificate

active

07115454

ABSTRACT:
A process is provided for producing an image display device which includes a thin film semiconductor device. In accordance with the process, semiconductor crystal grains are grown in a transverse direction in a semiconductor film by modulating a continuous wave laser into a pulsed laser beam and then irradiating the pulsed laser beam on the semiconductor film.

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