Thin film semiconductor device for active matrix panel

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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H01L 2978

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active

061506923

ABSTRACT:
A thin film semiconductor device comprising a thin film transistor (TFT) having a thin film semiconductor on an insulation substrate to define an element region, and a hygroscopic interlayer insulating layer which covers said element,

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