Thin film resonator, method for making thin film resonator...

Details Thin film resonator, method for making thin film resonator... Thin film resonator, method for making thin film resonator...

2004-09-09

2008-10-07

Takaoka, Dean O (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S188000

Reexamination Certificate

active

07432785

ABSTRACT:
A thin film resonator having a membrane layer formed on top of a substrate, a lower electrode formed on part of the top surface of the membrane layer, a piezoelectric layer formed on top of the lower electrode, an upper electrode formed on top of the piezoelectric layer, and a mass loading layer interposed between the lower electrode and the membrane layer and having a predetermined mass. This structure enables precise adjustment of the resonant frequency of the thin film resonator, thereby providing a more precise filter.

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