Thin film resistor with current density enhancing layer (CDEL)

Details Thin film resistor with current density enhancing layer (CDEL) Thin film resistor with current density enhancing layer (CDEL)

2007-09-18

2007-09-18

Lee, Richard K. (Department: 2832)

Electrical resistors

With base extending along resistance element

Resistance element coated on base

C338S020000, C361S207000, C438S270000, C257S767000

Reexamination Certificate

active

10906365

ABSTRACT:
A thin film resistor device and method of manufacture includes a layer of a thin film conductor material and a current density enhancing layer (CDEL). The CDEL is an insulator material adapted to adhere to the thin film conductor material and enables the said thin film resistor to carry higher current densities with reduced shift in resistance. In one embodiment, the thin film resistor device includes a single CDEL layer formed on one side (atop or underneath) the thin film conductor material. In a second embodiment, two CDEL layers are formed on both sides (atop and underneath) of the thin film conductor material. The resistor device may be manufactured as part of both BEOL and FEOL processes.

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