Thin-film patterning method, manufacturing method of...

Details Thin-film patterning method, manufacturing method of... Thin-film patterning method, manufacturing method of...

2005-01-04

2005-01-04

Norton, Nadine G. (Department: 1765)

Semiconductor device manufacturing: process

Chemical etching

Combined with coating step

C438S704000

Reexamination Certificate

active

06838384

ABSTRACT:
A method of patterning a thin film includes a step of forming at least one strippable conductive film on a surface of a thin film to be patterned, a step of forming a mask on the at least one strippable conductive film, a step of patterning the thin film to be patterned by dry etching using the mask, and a step of removing the at least one strippable conductive film.

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