Dynamic magnetic information storage or retrieval – Head – Coil
Patent
1986-07-22
1988-07-26
Wolff, John H.
Dynamic magnetic information storage or retrieval
Head
Coil
360125, G11B 520, G11B 512
Patent
active
047604816
ABSTRACT:
Disclosed is a thin film magnetic head having a structure wherein the main portion of a coil consists of a copper or copper alloy layer and its upper surface is covered with a thin film mask consisting of titanium, titanium oxide, chromium and/or chromium oxide. The magnetic head of the invention can prevent the occurrence of projecting etching residues at the upper edge portion of the coil and can easily increase the cross-sectional area and the winding density of the coil. Furthermore, when the thin film mask consists of titanium and/or titanium oxide, a titanium diffusion prevention film consisting of chromium, for example, is interposed between the thin film mask and the copper or copper alloy, so that the resistance change of the coil scarcely takes place owing to heat treatment in a production process after the formation of the coil and the head reliability can be further improved.
REFERENCES:
patent: 4219854 (1980-08-01), Church et al.
Fabrication of a Multitrack, Thin Film Head by Nord et al., J. Appl. Phys. 53 (3), Mar. 1982 pp. 2611-2613.
Hamakawa Yoshihiro
Moriwaki Eijin
Saito Harunobu
Shiiki Kazuo
Shiokawa Keiko
Hitachi , Ltd.
Wolff John H.
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