Thin film coil and method of forming the same, and thin film...

Details Thin film coil and method of forming the same, and thin film... Thin film coil and method of forming the same, and thin film...

2008-01-15

2008-01-15

Evans, Jefferson (Department: 2627)

Dynamic magnetic information storage or retrieval

Head

Coil

C360S125330

Reexamination Certificate

active

10849194

ABSTRACT:
Provided are a thin film coil formed at high densities, a method of forming a thin film coil, a thin film magnetic head which includes the thin film coil and thus enables ensuring stable recording characteristics while coping with a higher recording density, and a method of manufacturing a thin film magnetic head. The thin film coil includes a first coil having a top surface having the maximum width, an insulating wall formed by selectively etching an insulating layer filling a region between windings by using the first coil as a mask, and a second coil isolated from the first coil by the insulating wall. This easily enables forming the thin film coil in a narrower space, while ensuring electrical insulation between the windings of the first and second coils.

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