Thin film coil and method of forming the same, and thin film...

Dynamic magnetic information storage or retrieval – Head – Coil

Reexamination Certificate

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C360S125330

Reexamination Certificate

active

07319572

ABSTRACT:
Provided are a thin film coil formed at high densities, a method of forming a thin film coil, a thin film magnetic head which includes the thin film coil and thus enables ensuring stable recording characteristics while coping with a higher recording density, and a method of manufacturing a thin film magnetic head. The thin film coil includes a first coil having a top surface having the maximum width, an insulating wall formed by selectively etching an insulating layer filling a region between windings by using the first coil as a mask, and a second coil isolated from the first coil by the insulating wall. This easily enables forming the thin film coil in a narrower space, while ensuring electrical insulation between the windings of the first and second coils.

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patent: A-11-259813 (1999-09-01), None
patent: A 2001-60307 (2001-03-01), None
patent: A 2002-343639 (2002-11-01), None

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