Thin film battery and manufacturing method

Chemistry: electrical current producing apparatus – product – and – Current producing cell – elements – subcombinations and... – Flat-type unit cell and specific unit cell components

Reexamination Certificate

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C429S221000, C429S223000, C429S224000, C429S231500, C429S231950, C204S192150

Reexamination Certificate

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07862927

ABSTRACT:
In a method of fabricating a battery, a substrate is annealed to reduce surface contaminants or even water of crystallization from the substrate. A series of battery component films are deposited on a substrate, including an adhesion film, electrode films, and an electrolyte film. An adhesion film is deposited on the substrate and regions of the adhesion film are exposed to oxygen. An overlying stack of cathode films is deposited in successive deposition and annealing steps.

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