Optical: systems and elements – Mirror – Plural mirrors or reflecting surfaces
Patent
1995-04-28
1997-06-03
Callahan, Timothy P.
Optical: systems and elements
Mirror
Plural mirrors or reflecting surfaces
359290, 359295, 359297, 359224, 310328, 310366, 29 2535, G02B 508, G02B 7182, H04R 1700
Patent
active
056360703
ABSTRACT:
A method for forming an array of M.times.N thin film actuated mirrors for use in an optical projection system comprises the steps of: (a) forming a sacrificial layer on top of an active matrix; (b) forming an array of M.times.N supporting members on the sacrificial layer; (c) depositing an elastic layer; (d) forming M.times.N conduits; (e) depositing a second thin film layer; (f) forming an electrodisplacive layer; (g) patterning the elastic layer, the second layer and the electrodisplacive layer to form an array of M.times.N semifinished actuated mirror structures; (h) heat treating the array of M.times.N semifinished actuated mirror structures; (i) depositing a first thin film layer on each of the semifinished actuated mirror structures to form an array of M.times.N actuated mirror structures; (j) covering each of the actuated mirror structures with a protection layer; and (k) removing the protection layer and the sacrificial layer to thereby form said array of M.times.N thin film actuated mirrors.
REFERENCES:
patent: 5159225 (1992-10-01), Um
patent: 5469302 (1995-11-01), Lim
patent: 5481396 (1996-01-01), Ji et al.
patent: 5505807 (1996-04-01), Min et al.
patent: 5506720 (1996-04-01), Yoon
Ji Jeong-Beom
Kim Dong-Kuk
Callahan Timothy P.
Daewoo Electronics Co Ltd.
Shin Eunja
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