Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2006-12-12
2006-12-12
Morgan, Eileen P. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S010000, C451S011000, C451S041000, C451S262000, C451S269000, C451S287000
Reexamination Certificate
active
07147541
ABSTRACT:
The object of the present invention is to provide a double side polisher capable of maintaining thickness control accuracy over a long period of time without being affected by a gradual change in thickness of a polishing pad, and a thickness control method. The first polishing operation is finished based on the polishing duration time, and the second and subsequent polishing operations are finished based on the measured distance values of a distance sensor, and after each polishing operation including the first polishing, the measured value of the distance sensor is calibrated based on the measured value and target value of finishing thickness of the work piece. Since the calibration is performed for each polishing operation, it is possible to maintain thickness control accuracy over a long period of time.
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Inoue Yusuke
Nagayama Hitoshi
Morgan Eileen P.
Speedfam Co., Ltd.
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