Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – With lattice constant mismatch
Reexamination Certificate
2010-04-21
2011-12-20
Jackson, Jr., Jerome (Department: 2815)
Active solid-state devices (e.g., transistors, solid-state diode
Heterojunction device
With lattice constant mismatch
C257S013000, C257S094000, C257S103000, C257SE33028, C257SE33067, C438S047000
Reexamination Certificate
active
08080833
ABSTRACT:
In various embodiments, a semiconductor device includes an aluminum nitride single-crystal substrate, a pseudomorphic strained layer disposed thereover that comprises at least one of AlN, GaN, InN, or an alloy thereof, and, disposed over the strained layer, a semiconductor layer that is lattice-mismatched to the substrate and substantially relaxed.
REFERENCES:
patent: 3531245 (1970-09-01), Dietz
patent: 3600701 (1971-08-01), Gouldthorpe
patent: 3603414 (1971-09-01), Stebley
patent: 3607014 (1971-09-01), Huml et al.
patent: 3634149 (1972-01-01), Knippenberg et al.
patent: 3768983 (1973-10-01), Elkins et al.
patent: 3903357 (1975-09-01), Woolfson et al.
patent: 3933573 (1976-01-01), Dugger
patent: 4008851 (1977-02-01), Hirsch
patent: 4088515 (1978-05-01), Blakeslee et al.
patent: 4234554 (1980-11-01), Rabenau et al.
patent: 4547471 (1985-10-01), Huseby et al.
patent: 5070393 (1991-12-01), Nakagawa et al.
patent: 5087949 (1992-02-01), Haitz
patent: 5292487 (1994-03-01), Tatsumi et al.
patent: 5312698 (1994-05-01), Sato et al.
patent: 5494861 (1996-02-01), Yamaga et al.
patent: 5520785 (1996-05-01), Evans et al.
patent: 5525320 (1996-06-01), Pratsinis et al.
patent: 5571603 (1996-11-01), Utumi et al.
patent: 5670798 (1997-09-01), Schetzina
patent: 5703397 (1997-12-01), Endo et al.
patent: 5728635 (1998-03-01), Kobayashi et al.
patent: 5858085 (1999-01-01), Arai et al.
patent: 5858086 (1999-01-01), Hunter
patent: 5868837 (1999-02-01), DiSalvo et al.
patent: 5909036 (1999-06-01), Tanaka et al.
patent: 5924874 (1999-07-01), Gotoh et al.
patent: 5954874 (1999-09-01), Hunter
patent: 5972109 (1999-10-01), Hunter
patent: 5981980 (1999-11-01), Miyajima et al.
patent: 6000174 (1999-12-01), Yamazaki et al.
patent: 6001748 (1999-12-01), Tanaka et al.
patent: 6006620 (1999-12-01), Lawrie et al.
patent: 6045612 (2000-04-01), Hunter
patent: 6048813 (2000-04-01), Hunter
patent: 6063185 (2000-05-01), Hunter
patent: 6066205 (2000-05-01), Hunter
patent: 6086672 (2000-07-01), Hunter
patent: 6091085 (2000-07-01), Lester
patent: 6187089 (2001-02-01), Phillips et al.
patent: 6211089 (2001-04-01), Kim et al.
patent: 6270569 (2001-08-01), Shibata et al.
patent: 6296956 (2001-10-01), Hunter
patent: 6398867 (2002-06-01), D'Evelyn et al.
patent: 6404125 (2002-06-01), Garbuzov et al.
patent: 6447604 (2002-09-01), Flynn et al.
patent: 6468347 (2002-10-01), Motoki et al.
patent: 6515308 (2003-02-01), Kneissl et al.
patent: 6548405 (2003-04-01), Kraus et al.
patent: 6592663 (2003-07-01), Sarayama et al.
patent: 6596079 (2003-07-01), Vaudo et al.
patent: 6719843 (2004-04-01), Schowalter et al.
patent: 6770135 (2004-08-01), Schowalter et al.
patent: 6777717 (2004-08-01), Karlicek
patent: 6791119 (2004-09-01), Slater, Jr. et al.
patent: 6831302 (2004-12-01), Erchak
patent: 6840431 (2005-01-01), Kim
patent: 6861729 (2005-03-01), Kozaki et al.
patent: 6936357 (2005-08-01), Melnik et al.
patent: 6995402 (2006-02-01), Ludowise et al.
patent: 7026659 (2006-04-01), Slater, Jr. et al.
patent: 7037738 (2006-05-01), Sugiyama et al.
patent: 7037838 (2006-05-01), Schowalter et al.
patent: 7056383 (2006-06-01), Helava et al.
patent: 7063741 (2006-06-01), D'Evelyn et al.
patent: 7087112 (2006-08-01), Rojo et al.
patent: 7125734 (2006-10-01), Sackrison
patent: 7186580 (2007-03-01), Tran et al.
patent: 7211146 (2007-05-01), Schowalter et al.
patent: 7211831 (2007-05-01), Erchak et al.
patent: 7244520 (2007-07-01), Kumakura et al.
patent: 7250637 (2007-07-01), Shimizu
patent: 7274043 (2007-09-01), Erchak et al.
patent: 7276779 (2007-10-01), Shibata
patent: 7288152 (2007-10-01), Kitaoka et al.
patent: 7420218 (2008-09-01), Nagai
patent: 7420222 (2008-09-01), Slater, Jr. et al.
patent: 7439552 (2008-10-01), Takigawa et al.
patent: 7476910 (2009-01-01), Fujimoto et al.
patent: 7518158 (2009-04-01), Keller et al.
patent: 7524376 (2009-04-01), Wang
patent: 7554128 (2009-06-01), Okamoto et al.
patent: 7631986 (2009-12-01), Harrah
patent: 7638346 (2009-12-01), Schowalter et al.
patent: 7641735 (2010-01-01), Slack et al.
patent: 7674699 (2010-03-01), Shibata
patent: 7678195 (2010-03-01), Schlesser et al.
patent: 7713844 (2010-05-01), Nishiura et al.
patent: 7755103 (2010-07-01), Ueno
patent: 7776153 (2010-08-01), Schowalter
patent: 7803733 (2010-09-01), Teratani et al.
patent: 2001/0000209 (2001-04-01), Krames et al.
patent: 2001/0024871 (2001-09-01), Yagi
patent: 2001/0051433 (2001-12-01), Francis et al.
patent: 2002/0170490 (2002-11-01), Vodakov et al.
patent: 2003/0047816 (2003-03-01), Dutta
patent: 2003/0160254 (2003-08-01), Henrichs
patent: 2003/0168003 (2003-09-01), Schowalter et al.
patent: 2003/0213964 (2003-11-01), Flynn
patent: 2003/0216011 (2003-11-01), Nakamura et al.
patent: 2004/0130002 (2004-07-01), Weeks et al.
patent: 2004/0187766 (2004-09-01), Letertre
patent: 2004/0206978 (2004-10-01), Saxler
patent: 2004/0213309 (2004-10-01), Amano et al.
patent: 2004/0224484 (2004-11-01), Fareed et al.
patent: 2004/0226917 (2004-11-01), Laconto et al.
patent: 2004/0245535 (2004-12-01), D'Evelyn et al.
patent: 2005/0062392 (2005-03-01), Sakai et al.
patent: 2005/0072986 (2005-04-01), Sasaoka
patent: 2005/0103257 (2005-05-01), Xu et al.
patent: 2005/0142391 (2005-06-01), Dmitriev et al.
patent: 2005/0161697 (2005-07-01), Nakahata et al.
patent: 2005/0214992 (2005-09-01), Chakraborty et al.
patent: 2005/0269577 (2005-12-01), Ueda et al.
patent: 2005/0277214 (2005-12-01), Uematsu et al.
patent: 2005/0285141 (2005-12-01), Piner et al.
patent: 2006/0005763 (2006-01-01), Schowalter et al.
patent: 2006/0029832 (2006-02-01), Xu et al.
patent: 2006/0054075 (2006-03-01), Dwilinski et al.
patent: 2006/0244011 (2006-11-01), Saxler
patent: 2006/0255341 (2006-11-01), Pinnington et al.
patent: 2006/0281205 (2006-12-01), Park
patent: 2006/0288929 (2006-12-01), Slack et al.
patent: 2007/0018184 (2007-01-01), Beeson et al.
patent: 2007/0101932 (2007-05-01), Schowalter et al.
patent: 2007/0102721 (2007-05-01), Denbaars et al.
patent: 2007/0131160 (2007-06-01), Slack et al.
patent: 2007/0134827 (2007-06-01), Bondokov et al.
patent: 2007/0243653 (2007-10-01), Morgan et al.
patent: 2007/0257333 (2007-11-01), Schlesser et al.
patent: 2008/0012034 (2008-01-01), Thielen et al.
patent: 2008/0036038 (2008-02-01), Hersee et al.
patent: 2008/0054280 (2008-03-01), Reginelli et al.
patent: 2008/0121910 (2008-05-01), Bergmann et al.
patent: 2008/0135861 (2008-06-01), Pokrovskiy et al.
patent: 2008/0142817 (2008-06-01), Ibbetson et al.
patent: 2008/0144688 (2008-06-01), Chua et al.
patent: 2008/0149945 (2008-06-01), Nagai
patent: 2008/0149960 (2008-06-01), Amo et al.
patent: 2008/0157111 (2008-07-01), Erchak et al.
patent: 2008/0173887 (2008-07-01), Baba et al.
patent: 2008/0182092 (2008-07-01), Bondokov et al.
patent: 2008/0187016 (2008-08-01), Schowalter et al.
patent: 2008/0191225 (2008-08-01), Medendorp
patent: 2008/0251808 (2008-10-01), Kususe et al.
patent: 2008/0258165 (2008-10-01), Zimmerman et al.
patent: 2009/0008654 (2009-01-01), Nagai
patent: 2009/0014742 (2009-01-01), Erchak
patent: 2009/0039373 (2009-02-01), Saito et al.
patent: 2009/0050050 (2009-02-01), Slack et al.
patent: 2009/0065791 (2009-03-01), Yen et al.
patent: 2009/0078957 (2009-03-01), Hoshina
patent: 2009/0121246 (2009-05-01), Denbaars et al.
patent: 2009/0121250 (2009-05-01), Denbaars et al.
patent: 2009/0140279 (2009-06-01), Zimmerman et al.
patent: 2009/0141502 (2009-06-01), Sonoda et al.
patent: 2009/0155989 (2009-06-01), Uematsu et al.
patent: 2009/0159910 (2009-06-01), Lin et al.
patent: 2009/0166657 (2009-07-01), Yamada et al.
patent: 2009/0173958 (2009-07-01), Chakraborty et al.
patent: 2009/0233394 (2009-09-01), Batres et al.
patent: 2009/0239357 (2009-09-01), Amano et al.
patent: 2009/0256163 (2009-10-01), Chakraborty
patent: 2009/0261372 (2009-10-01), Ueda
patent: 2009/0267098 (2009-10-01), Choi
patent: 2009/0278148 (2009-11-01), Nabekura et al.
patent: 2009/0315054 (2009-12-01), Kim et al.
patent: 2009/0321758 (2009-12-01), Liu et al.
patent: 2009/0321771 (2009-12-01), Hattori et al.
patent: 2010/0006870 (2010-01-01), Lee et al.
patent: 2010/0012956 (2010-01-01), Yoo et al.
pat
Gibb Shawn R.
Grandusky James R.
Liu Shiwen
Schowalter Leo J.
Smart Joseph A.
Bingham & McCutchen LLP
Crystal IS Inc.
Jackson, Jr. Jerome
LandOfFree
Thick pseudomorphic nitride epitaxial layers does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Thick pseudomorphic nitride epitaxial layers, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thick pseudomorphic nitride epitaxial layers will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4265092