Thermosetting anti-reflective coatings at deep ultraviolet

Details Thermosetting anti-reflective coatings at deep ultraviolet Thermosetting anti-reflective coatings at deep ultraviolet

1997-09-30

1999-07-06

McPherson, John A.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

4302701, 430512, 523436, 525523, 525533, G03C 1492, C08K 6300, C08F28310

Patent

active

059195991

ABSTRACT:
Anti-reflective coating compositions having improved etch rate, inter alia, are prepared from certain high molecular weight polymers and copolymers, particularly glycidyl methacrylate with grafted dyes.

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patent: 5294680 (1994-03-01), Knors et al.
patent: 5482817 (1996-01-01), Dichiara et al.
patent: 5654376 (1997-08-01), Knors et al.
patent: 5693691 (1997-12-01), Flaim et al.
patent: 5731385 (1998-03-01), Knors et al.

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