Thermosetting anti-refective coatings

Details Thermosetting anti-refective coatings Thermosetting anti-refective coatings

1999-03-22

2000-12-05

Baxter, Janet

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

4302711, G03F 7004

Patent

active

061564796

ABSTRACT:
Anti-reflective coating compositions having improved etch rate, inter alia, are prepared from certain acrylic polymers and copolymers, such as, glycidyl methacrylate reacted with non-polycyclic carboxylic acid dyes and non-polycyclic phenolic dyes, all light absorbing at a wavelength of 193 nm.

REFERENCES:
patent: 4544691 (1985-10-01), Dexter et al.
patent: 5482817 (1996-01-01), Dichiara et al.
patent: 5693691 (1997-12-01), Flaim et al.
patent: 5731385 (1998-03-01), Knors et al.

Affiliated with

Also associated with

Rating

Thermosetting anti-refective coatings does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thermosetting anti-refective coatings, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thermosetting anti-refective coatings will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-960002