Thermophoretic wand to protect front and back surfaces of an...

Details Thermophoretic wand to protect front and back surfaces of an... Thermophoretic wand to protect front and back surfaces of an...

2007-01-16

2007-01-16

Ali, Mohammad M. (Department: 3744)

Refrigeration

Processes

Treating an article

C062S293000

Reexamination Certificate

active

10819509

ABSTRACT:
Methods and apparatus for enabling a clean, fragile object to be transported while protecting both front and back surfaces of the object are disclosed. According to one aspect of the present invention, a thermophoretic wand that is arranged to carry an object having a first temperature includes a first element, a contact surface, and an air supply. The first element has a first opening defined therein, and is maintained at a second temperature that is lower than the first temperature such that when the first element is in proximity to the object, a thermophoretic forces may be such that particles present between the object and the first element are driven away from the object. The air supply applies a vacuum of a first level through the first opening to suction the object against the contact surface.

REFERENCES:
patent: 4597551 (1986-07-01), Ciechanowski et al.
patent: 4687242 (1987-08-01), Van Rooy
patent: 4744594 (1988-05-01), Poli et al.
patent: 5158690 (1992-10-01), Batchelder et al.
patent: 5172949 (1992-12-01), Nagai et al.
patent: 5217273 (1993-06-01), Hendricsen et al.
patent: 5314538 (1994-05-01), Maeda et al.
patent: 5783754 (1998-07-01), MacPherson
patent: 6051169 (2000-04-01), Brown et al.
patent: 6072157 (2000-06-01), Klebanoff et al.
patent: 6136156 (2000-10-01), El-Shall et al.
patent: 6232578 (2001-05-01), Klebanoff et al.
patent: 6242718 (2001-06-01), Ferro et al.
patent: 6430263 (2002-08-01), Lu et al.
patent: 6604365 (2003-08-01), Sekimoto et al.
patent: 6663333 (2003-12-01), Kinnard et al.
patent: 6704496 (2004-03-01), Jacobson et al.
patent: 6860533 (2005-03-01), Lee et al.
patent: 6861321 (2005-03-01), Keeton et al.
patent: 2004/0182416 (2004-09-01), Allen et al.
patent: 2001-35826 (2001-02-01), None
patent: 2001-230459 (2001-08-01), None
M. A. Gallis et al., “Thermophoresis in Rarefied Gas Flows,” Aerosol Science and Technology 36, 2002, pp. 1099-1117.
Daniel E. Dedrick et al., “Verification Studies of Thermophoretic Protection for Extreme Ultraviolet Masks,” J.Vac. Sci. Technol. B, vol. 23, No. 1, Jan./Feb. 2005, pp. 307-317.

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