Electric heating – Heating devices – Tool or instrument
Patent
1998-12-11
2000-06-06
Jeffery, John A.
Electric heating
Heating devices
Tool or instrument
294 641, 279 3, 269 21, 219521, B25J 1506, B66C 102, H01L 2168
Patent
active
06072157&
ABSTRACT:
A thermophoretic vacuum wand that is particularly suited for transporting articles in a cleanroom environment so that potential particle contaminants in the air do not become adhered to the surface of the article is described. The wand includes a housing having a platen with a front surface with suction port(s) through the platen; a vacuum source for applying a negative pressure to the suction port(s); and heating device for the object. Heating the article when it is held by the vacuum wand affords thermophoretic protection that effectively prevents particles in the air from depositing onto the article.
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Nazaroff, W.W., et al., "Particle Deposition from a Natural Convection Flow onto a Vertical Isothermal Flat Plate" J. Aerosol Sci., vol. 18, No. 4, pp. 445-455.
Klebanoff Leonard Elliott
Rader Daniel John
EUV LLC
Jeffery John A.
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