Thermally controlled sold immersion lens fixture

Details Thermally controlled sold immersion lens fixture Thermally controlled sold immersion lens fixture

2007-06-29

2010-02-09

Thompson, Timothy J (Department: 2873)

Optical: systems and elements

Lens

With support

C359S819000

Reexamination Certificate

active

07660054

ABSTRACT:
Embodiments allow for uniform die cooling or heating with a solid immersion lens equipped microscope over a larger temperature range than is currently attainable using liquid coolant. The SIL tip is insulated from the rest of the objective body to realize a controllable temperature. This thermal control may be done by convection or Joule heating. If the tip is to be cooled, cold gas may be injected through channels around the tip and fins. If the tip is to be heated, hot gas may be injected around the tip and fins208or an electrical heater may be thermal anchored to the tip and a current passed through it to deliver power.

REFERENCES:
patent: 7382399 (2008-06-01), McCall et al.
patent: 2005/0259933 (2005-11-01), Temelkuran et al.

Affiliated with

Also associated with

Rating

Thermally controlled sold immersion lens fixture does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thermally controlled sold immersion lens fixture, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thermally controlled sold immersion lens fixture will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4204858