Thermal measuring and testing – Temperature measurement – Temperature distribution or profile
Patent
1993-09-27
1995-08-15
Gutierrez, Diego F. F.
Thermal measuring and testing
Temperature measurement
Temperature distribution or profile
374 44, 374124, 374142, 374164, 250307, 73105, 356376, G01K 700, G01K 306, G01N 2518, G01B 904
Patent
active
054413435
ABSTRACT:
The scanning thermal probe microscope measures a thermal parameter such as thermal conductivity or temperature of surface contours of a specimen with a thermal sensor maintained in thermal communication with the surface of the specimen and maintained at a temperature different than that of the specimen. The thermal sensor is disposed on the free end of a cantilever arm in thermal communication with the probe. A thermal feedback bridge circuit can maintain the thermal sensor at a constant temperature by heating or cooling the sensor, and provides a signal for determining the heat transfer between the probe and the specimen. The cantilever arm includes first and second legs of electrically conductive material, and the thermal sensor comprises a narrowed portion of the conducting material having a relatively high temperature coefficient of resistance.
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Pylkki Russell J.
Schuman Marc
West Paul E.
Gutierrez Diego F. F.
Topometrix Corporation
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