Thermal processing of oxide-compound semiconductor structures

Details Thermal processing of oxide-compound semiconductor structures Thermal processing of oxide-compound semiconductor structures

1997-07-17

1999-05-11

Bowers, Charles

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

438608, 438767, H01L21/28

Patent

active

059021306

ABSTRACT:
A method of thermal processing a supporting structure comprised of various compound semiconductor layers having a Gd free Ga.sub.2 O.sub.3 surface layer including coating the surface layer with a dielectric or a metallic cap layer or combinations thereof, such that the low D.sub.it Ga.sub.2 O.sub.3 -compound semiconductor structure is conserved during thermal processing, e.g. during activation of ion implants of a self aligned metal-oxide-compound semiconductor gate structure. In a preferred embodiment, the semiconductor structure has a surface of GaAs, the Gd free Ga.sub.2 O.sub.3 layer has a thickness in a range of approximately 1 nm to 20 nm, and the insulating or metallic cap layer has a thickness in a range of approximately 1 nm to 500 nm.

REFERENCES:
patent: 4172906 (1979-10-01), Pancholy
patent: 4343870 (1982-08-01), Heller et al.
patent: 4837175 (1989-06-01), Calviello
patent: 4859253 (1989-08-01), Buchanan et al.
patent: 5597768 (1997-01-01), Passlack
patent: 5665658 (1997-09-01), Passlack

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