Coating apparatus – Gas or vapor deposition – With treating means
Patent
1994-03-01
1996-05-28
Breneman, R. Bruce
Coating apparatus
Gas or vapor deposition
With treating means
118725, 118729, 118730, 432241, C23C 1600
Patent
active
055207421
ABSTRACT:
A heat shielding member is provided on an object-to-be-processed holder for loading/unloading an object to be processed to/from a thermal processing position. The heat shielding member can cover a space below the processing position. As a result, leakage of radiation heat from the processing position can be blocked, and an optimum temperature gradient at the processing position can be maintained. Accordingly the entire surface of the object to be processed can be efficiently thermally processed at uniform temperatures, and throughputs in the fabrication steps can be improved.
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Breneman R. Bruce
Lund Jeffrie R.
Tokyo Electron Kabushiki Kaisha
Tokyo Electron Tohoku Kabushiki Kaisha
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