Thermal processing apparatus with a shield between heater and su

Details Thermal processing apparatus with a shield between heater and su Thermal processing apparatus with a shield between heater and su

1997-02-26

1999-11-23

Leung, Philip H.

Electric resistance heating devices

Heating devices

Radiant heater

392416, 118724, 118725, F26B 330

Patent

active

059915080

ABSTRACT:
A thermal processing apparatus having a substrate holding unit for mounting a substrate, a housing for constituting a processing chamber to house the substrate mounted on the substrate holding unit, a heat source arranged around the housing, and a shielding means arranged between the heat source and an end of the substrate, the shielding means serving to shield heat radiation radiated into the end of the substrate.

REFERENCES:
patent: 4814605 (1989-03-01), Junkermann
patent: 5308955 (1994-05-01), Watanabe
patent: 5332557 (1994-07-01), Shahoda
patent: 5414244 (1995-05-01), Imahashi
patent: 5509967 (1996-04-01), Kypgpku et al.
patent: 5518593 (1996-05-01), Hosokawa et al.
patent: 5520742 (1996-05-01), Ohkase
patent: 5626680 (1997-05-01), Porter et al.
patent: 5636320 (1997-06-01), Yu

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