Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2006-05-09
2006-05-09
Fuqua, Shawntina T. (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S405000, C219S411000, C392S416000, C392S418000, C118S724000, C118S725000, C118S050100, C118S728000, C118S729000
Reexamination Certificate
active
07041939
ABSTRACT:
In a thermal processing apparatus (1), an upper opening (60) is closed by a transparent plate (61) and a light emitting part (5) emits light through the upper opening (60). Also provided are a susceptor (72) for supporting a substrate (9), a hot plate (71) for heating the susceptor (72) and a cover member (21) between the transparent plate (61) and the susceptor (72). The susceptor (72) has a recessed portion whose depth is larger than the thickness of the substrate (9), a lower surface of the substrate (9) is supported by a bottom surface of the recessed portion, and a periphery of the substrate (9) is surrounded by the side wall portion of the recessed portion. During processing of the substrate (9), the cover member (21) is moved down and brought into contact with an upper end of the side wall portion to close the recessed portion. Thus the periphery of the substrate (9) is blocked, so that even if the substrate (9) is broken during processing, the pieces of the substrate are prevented from being scattered.
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Dainippon Screen Mfg. Co,. Ltd.
Fuqua Shawntina T.
Ostrolenk Faber Gerb & Soffen, LLP
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