Thermal head producing process

Details Thermal head producing process Thermal head producing process

1985-10-15

1986-10-14

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

1566591, 156664, 427 38, 427 88, 427294, C23F 102, B44C 122

Patent

active

046170880

ABSTRACT:
A thermal head composed of an electrically insulative substrate, a resistive film made of TiO.sub.x (0<x<2) formed on the substrate, and an electrode made of a metal such as Au, Al, and Cu etc. The resistive film is produced by an electron beam vapor deposition method employing an apparatus having a vacuum chamber wherein an evaporation source composed of Ti is irradiated with an electron beam to evaporate Ti so as to deposit a resultant TiO.sub.x on the substrate.

REFERENCES:
patent: 4206541 (1980-06-01), Marciniec

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