Electric heating – Metal heating – By arc
Reexamination Certificate
2006-02-28
2006-02-28
Evans, Geoffrey S. (Department: 1725)
Electric heating
Metal heating
By arc
C219S121650, C438S487000
Reexamination Certificate
active
07005601
ABSTRACT:
The thermal flux processing device includes a continuous wave electromagnetic radiation source, a stage, optics, and a translation mechanism. The continuous wave electromagnetic radiation source is preferably a diode/s. The stage is configured to receive a semiconductor substrate thereon. The optics are preferably disposed between the continuous wave electromagnetic radiation source and the stage. Also, the optics are configured to focus continuous wave electromagnetic radiation from the continuous wave electromagnetic radiation source into a line of continuous wave electromagnetic radiation on an upper surface of the semiconductor substrate. A length of the line of continuous wave electromagnetic radiation extends across an entire width of the semiconductor substrate. The translation mechanism is configured to translate the stage and the line of continuous wave electromagnetic radiation relative to one another, and preferably includes a chuck for securely grasping the substrate. A method for thermally processing a semiconductor substrate is also provided.
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Applied Materials Inc.
Evans Geoffrey S.
Guenzer, Esq. Charles
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