Thermal cycling module and process using radiant heat

Details Thermal cycling module and process using radiant heat Thermal cycling module and process using radiant heat

1998-02-23

2000-01-25

Pelham, Jospeh

Electric resistance heating devices

Heating devices

Radiant heater

219411, 219390, 118724, 118732, 118 501, 62 33, 62 37, 62179, 62331, 165 64, 165 804, C23C 1600, F27B 514, F29B 2900

Patent

active

06018616&

ABSTRACT:
In general, the present invention provides a single thermal cycling module for baking and chilling a substrate, such as a wafer, that is in thermal contact with a foil heater, a heat exchanger, and a radiation heater. The radiation heater thermally heats a fluid contained by the heat exchanger, which in turn, thermally bakes the substrate at a desired temperature. When the radiation heater is deactivated, a fluid circulates through the heat exchanger to chill the substrate. The foil heater assists the baking and chilling phases by elevating the temperature of the substrate when necessary to prevent or regulate temperature fluctuations of the substrate temperature. Both the radiation heater and the foil heater can provide several zones for varying the heat applied across the substrate, and a single fluid temperature is provided to the heat exchanger for both baking and chilling cycles.

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Database WPI, Section Ch. Week 8910, Derwent Publications Ltd., London, GB; Class L03, AN 89-073219, Jan. 27, 1989.

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