Thermal control system and method

Details Thermal control system and method Thermal control system and method

2007-02-20

2007-02-20

Norman, Marc (Department: 3744)

Refrigeration

Automatic control

Refrigeration producer

C062S222000, C062S224000, C062S513000

Reexamination Certificate

active

11057383

ABSTRACT:
A system and method for controlling the temperature of a process tool uses the vaporizable characteristic of a refrigerant that is provided in direct heat exchange relation with the process tool. Pressurized refrigerant is provided as both condensed liquid and in gaseous state. The condensed liquid is expanded to a vaporous mix, and the gaseous refrigerant is added to reach a target temperature determined by its pressure. Temperature corrections can thus be made very rapidly by gas pressure adjustments. The process tool and the operating parameters will usually require that the returning refrigerant be conditioned and processed for compatibility with the compressor and other units, so that cycling can be continuous regardless of thermal demands and changes.

REFERENCES:
patent: 4742689 (1988-05-01), Lowes
patent: 5906104 (1999-05-01), Schwartz et al.
patent: 5946925 (1999-09-01), Williams et al.
patent: 6250093 (2001-06-01), Fujii et al.
patent: 6279331 (2001-08-01), Hirota
patent: 6644048 (2003-11-01), Goth et al.

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