4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Glenn W. Zubillaga

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Heat exchanger and temperature control unit

Refrigeration – Automatic control – Refrigeration producer
Reexamination Certificate

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Method of operating a capacitively coupled plasma reactor...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Thermal control system and method

Refrigeration – Automatic control – Refrigeration producer
Reexamination Certificate

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Thermal control system and method

Refrigeration – Automatic control – Refrigeration producer
Reexamination Certificate

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