Electrical generator or motor structure – Non-dynamoelectric – Thermal or pyromagnetic
Patent
1999-01-19
2000-09-05
Dougherty, Thomas M.
Electrical generator or motor structure
Non-dynamoelectric
Thermal or pyromagnetic
H01L 3700, H02N 1000
Patent
active
06114794&
ABSTRACT:
A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause further arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.
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Dhuler Vijayakumar R.
Mahadevan Ramaswamy
Wood Robert L.
Cronos Integrated Microsystems, Inc.
Dougherty Thomas M.
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