Textured carbon surfaces on copper by sputtering

Electric lamp and discharge devices: systems – Cathode ray tube circuits – Combined cathode ray tube and circuit element structure

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204192C, 204192D, 204298, 313106, 313107, 427 39, 427 41, H01J 2302, C23C 1500

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active

046071938

ABSTRACT:
A very thin layer of highly textured carbon is applied to a copper surface by a triode sputtering process. A carbon target 10 and a copper substrate 12 are simultaneously exposed to an argon plasma 14 in a vacuum chamber.
The resulting carbon surface is characterized by a dense, random array of needle-like spires or peaks which extend perpendicularly from the copper surface. The coated copper is especially useful for electrode plates in multistage depressed collectors.

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Marinkovic et al., "Preparation and Properties of Sputtered `Glassy` Carbon Films," Carbon, 1976, vol. 14, No. 6, pp. 329-331.
NASA Technical Paper 1097 "Secondary-Electron-Emission Properties of Conducting Surface with Application of Multistage Depressed Collectors for Microwave Amplifiers" Forman-Nov. 1977.
NASA Technical Paper 2285 "Beam Impingement Angle Effects on Secondary Electron Emission Characteristics of Textured Pyrolytic Graphite" Curren et al-Feb. 1984.

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