Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Reexamination Certificate
2007-02-16
2011-12-27
Matthews, Colleen (Department: 2811)
Active solid-state devices (e.g., transistors, solid-state diode
Test or calibration structure
C257SE23179, C257SE21524, C324S763010
Reexamination Certificate
active
08084769
ABSTRACT:
A testkey design pattern includes a least one conductive contact, at least one conductive line of a first width vertically and electrically connected to the conductive contact, and at least one pair of source and drain respectively directly connected to each side of the conductive line. The pair of source and drain and part of the conductive line of a first length directly connected to the source and drain form an electronic device. The testkey design patterns are advantageous in measuring capacitance with less error and for better gate oxide thickness extraction.
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Chang Min-Yi
Cheng Tzyy-Ming
Chiou Da-Ching
Huang Cheng-Tung
Lee Chien-Hsing
Hsu Winston
Margo Scott
Matthews Colleen
United Microelectronics Corp.
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