Testing laminates with x-ray moire interferometry

Details Testing laminates with x-ray moire interferometry Testing laminates with x-ray moire interferometry

1996-12-30

2000-01-11

Jones, Deborah

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

428432, 428689, 428210, 257797, B32B 300, H01L 2329

Patent

active

060133554

ABSTRACT:
Registration of the layers in a multilayer electronic device is tested and measured by X-ray moire interferometry.

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Sharam, "Photolithographic Mask Aligner Based on Modified Moire Technique," Optical/Laser Microlithography VII Santa Clara, CA USA 22-24 Feb. 1995.

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