Testing apparatus using scanning electron microscope

Details Testing apparatus using scanning electron microscope Testing apparatus using scanning electron microscope

2005-10-11

2005-10-11

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S492200, C250S492300, C250S307000, C250S310000

Reexamination Certificate

active

06953939

ABSTRACT:
A testing apparatus using a scanning electron microscope for enabling tests and measurements on any part of a test subject in a nondestructive way without being limited by a size of the test subject, which is, a testing apparatus1using a scanning electron microscope for performing tests and measurements on any part of a test subject in a nondestructive way by using a scanning electron microscope6a, comprising a local vacuum formation portion9for forming a local vacuum region by blocking around a part to be tested of the test subject from the outside air, wherein the local vacuum formation portion comprises an exhaust portion for exhausting to form a partial vacuum region, a float means14for floating the whole local vacuum formation portion above the test subject by emitting a compressed gas to an outer circumference portion of the local vacuum formation portion and a length measuring means16for measuring a distance between the test subject and the local vacuum formation portion for controlling floating of the local vacuum formation portion by the float means.

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patent: 03-008428 (1991-01-01), None
patent: 08-264606 (1996-10-01), None
patent: 2001-242300 (2001-09-01), None

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