Data processing: measuring – calibrating – or testing – Testing system – Of circuit
Reexamination Certificate
2005-05-31
2005-05-31
Barlow, John (Department: 2863)
Data processing: measuring, calibrating, or testing
Testing system
Of circuit
C438S014000
Reexamination Certificate
active
06901342
ABSTRACT:
A method for modeling usage of semiconductor test wafers comprises the steps of: calculating an individual demand for test wafers by each of a plurality of tools, assigning respective ones of the plurality of tools to a plurality of levels based on ability of each tool to use wafers that have been processed by another one of the plurality of tools, assigning wafers made available by one of the plurality of tools to at least two other ones of the plurality of tools in proportion to the individual demands of each of the at least two other tools, and determining a total demand for test wafers, based on the number of wafers assigned to each of the plurality of tools in the lowest one of the plurality of levels.
REFERENCES:
Foster et al., Simulation of Test Wafer Consumption in a Semiconductor Facility, IEEE/SEMI Advanced Semiconductor Manufacturing Conference, p. 298-302, 1998.*
Foster et al., “Simulation of Test Wafer Consumption in a Semiconductor Facility”, 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, pp. 298-302.
Popovich et al., “Implementation of a Test Wafer Inventory Tracking System to Increase Efficiency in Monitor Wafer Usage”, 1997 IEEE/SEMI Advanced Semiconductor Manufacturing conference, pp. 440-443.
Jao Jung-Sheng
Lin Tai-Kun
Tsai Yi-Chun
Barlow John
Duane Morris LLP
Koffs Steven E.
Sun Xiuqin
Taiwan Semiconductor Manufacturing Co. Ltd.
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