Test system and failure parsing method thereof

Details Test system and failure parsing method thereof Test system and failure parsing method thereof

2011-01-04

2011-01-04

Tsai, Carol S (Department: 2857)

Data processing: measuring, calibrating, or testing

Testing system

Of circuit

C702S081000, C702S059000, C702S183000, C702S185000, C700S121000, C700S110000, C714S724000, C365S185090, C365S200000, C365S202000, C257SE21525, C382S145000

Reexamination Certificate

active

07865325

ABSTRACT:
A test system and a failure parsing method. The test system may comprise a cell array including defective cells formed according to various failure causes, a test apparatus configured to measure electric characteristics from the defective cells and make the measured electric characteristics numerical, and a database apparatus configured to store the numerical electric characteristics. The failure parsing method may include forming defective cells to have at least one failure cause, measuring electric characteristics of each of the defective cells, storing the measured electric characteristics of each of the defective cells in a database, and judging failure causes of a failed chip of a semiconductor wafer based on the database.

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