Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Electrical signal parameter measurement system
Reexamination Certificate
2011-03-29
2011-03-29
Schechter, Andrew (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Electrical signal parameter measurement system
C438S017000, C324S765010
Reexamination Certificate
active
07917316
ABSTRACT:
A test system and computer program for measuring threshold voltage variation using a device array provides accurate threshold voltage distribution values for process verification and improvement. The test system and computer program control a characterization array circuit that imposes a fixed drain-source voltage and a constant channel current at individual devices within the array. Another circuit senses the source voltage of the individual device within the array. The statistical distribution of the threshold voltage is determined directly from the source voltage distribution by offsetting each source voltage by a value determined by completely characterizing one or more devices within the array. The resulting methodology avoids the necessity of otherwise characterizing each device within the array, thus reducing measurement time dramatically.
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Agarwal Kanak B.
Nassif Sani R.
Harris Andrew M.
International Business Machines - Corporation
Mitch Harris Atty at Law, LLC
O'Malley Mary C
Schechter Andrew
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