Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2007-03-27
2007-03-27
Whitmore, Stacy A (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C438S011000, C257S048000
Reexamination Certificate
active
10490908
ABSTRACT:
A test structure combines a first structure (1010) for erosion evaluation with a second structure (1000) for extraction of defect size distributions. The first structure (1010) is a loop structure usable determine a resistance value that varies with metal height. The second structure is a NEST structure (1000). Loop lines of the loop structure (1010) are connected on both sides of the NEST structure (1000).
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Ciplickas Dennis J.
Decker Markus
Hess Christopher
Stine Brian E.
Weiland Larg H.
Duane Morris LLP
Koffs Steven E.
PDF Solutions, Inc.
Whitmore Stacy A
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