Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Reexamination Certificate
2007-07-11
2009-11-24
Coleman, W. David (Department: 2823)
Active solid-state devices (e.g., transistors, solid-state diode
Test or calibration structure
C438S017000, C257SE21531
Reexamination Certificate
active
07622737
ABSTRACT:
Test structures for electrically detecting BEOL failures are provided. In an embodiment, the structure comprises: an input/output connection disposed above a primary conductive pad which is embedded in an insulator; a dielectric layer disposed upon the insulator; a primary via extending through the dielectric layer down to the primary conductive pad for providing electrical connection between the input/output connection and the primary conductive pad; and a secondary via filled with a conductive material in electrical connection with the input/output connection, the secondary via extending through the dielectric layer down to a secondary interconnect in electrical connection with a secondary conductive pad that is insulated from the primary conductive pad.
REFERENCES:
patent: 5262719 (1993-11-01), Magdo
patent: 6564986 (2003-05-01), Hsieh
patent: 6633083 (2003-10-01), Woo et al.
patent: 6693417 (2004-02-01), Wilson
patent: 6861748 (2005-03-01), Low et al.
patent: 7098676 (2006-08-01), Landers et al.
patent: 7164149 (2007-01-01), Matsubara
patent: 7223673 (2007-05-01), Wang et al.
patent: 2002/0151093 (2002-10-01), Woo et al.
patent: 2002/0190729 (2002-12-01), Wilson
patent: 2004/0096995 (2004-05-01), Low et al.
patent: 2004/0129938 (2004-07-01), Landers et al.
patent: 2005/0082466 (2005-04-01), Smith et al.
patent: 07-193108 (1995-07-01), None
patent: 11-214568 (1999-08-01), None
patent: 09-312317 (2007-12-01), None
Hopper, “Test-Site Design for Monitoring Cracked SiO2”, IBM Technical Disclosure Bulletin, [online]; [retrieved on Jan. 8, 2007]; retrieved from https://www.delphion.com/tdbs/tdb?order=83A+61506.
Farooq Mukta G.
Liu Xiao H.
Melville Ian D.
Brown Katherine
Cantor & Colburn LLP
Coleman W. David
International Business Machines - Corporation
LandOfFree
Test structures for electrically detecting back end of the... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Test structures for electrically detecting back end of the..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Test structures for electrically detecting back end of the... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4091701