Test structures for development of metal-insulator-metal...

Details Test structures for development of metal-insulator-metal... Test structures for development of metal-insulator-metal...

2006-12-05

2008-12-23

Huynh, Andy (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Test or calibration structure

C257S296000, C257S532000, C257SE21521, C257SE21524, C438S011000, C438S014000, C438S015000, C438S018000

Reexamination Certificate

active

07468525

ABSTRACT:
In the present electronic test structure comprising, a conductor is provided, overlying a substrate. An electronic device overlies a portion of the conductor and includes a first electrode connected to the conductor, a second electrode, and an insulating layer between the first and second electrodes. A portion of the conductor is exposed for access thereto.

REFERENCES:
patent: 6495874 (2002-12-01), Kawamura et al.
patent: 6768153 (2004-07-01), Hoshi
patent: 6790685 (2004-09-01), Lee
patent: 7170090 (2007-01-01), Chaparala et al.
patent: 7348623 (2008-03-01), Akiyama
patent: 2003/0042521 (2003-03-01), Yoshitomi et al.

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